COOLING MEDIUM, COOLING UNIT, AND COOLING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a cooling medium capable of carrying out the cooling and the temperature control of a fine region in good accuracy.

SOLUTION: The cooling medium contains an emulsion constituted of a high-boiling point component as a continuous phase and a low-boiling point component as a dispersed phase. Preferably, the volume proportion h of the dispersed phase in the emulsion is ≥10% and ≤30%. The cooling medium preferably contains an oil-in-water emulsion composed of water as the continuous phase and n-hexane as the dispersed phase, and an ether-based compound as the surfactant.

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