| 摘要 |
PROBLEM TO BE SOLVED: To maintain high measurement resolution of nm order or lower, perform wide-range measurement, and switch, as necessary, to widen the range as performing high-resolution narrow-range measurements and perform wide-range measurements. SOLUTION: A scanning probe microscope is provided with a probe 20; an XYZ fine positioning mechanism 18 for providing relative displacements for a sample 16 and the probe; and a moving mechanism, comprising both an XY-moving part 12 provided above the reference plane of a microscope stage 11a, having the upper surface for mounting the sample, and moving over the reference plane and an XY actuator 13 for moving the XY-moving part a direction along the reference plane. The XYZ fine positioning mechanism comprises both a height-direction fine positioning mechanism and a surface-direction fine positioning mechanism. According to this constitution, when the surface of the sample is to be scanned by a probe for measuring the sample with the probe, either the surface-direction fine positioning mechanism or the moving mechanism will be used, and thereby the surface characteristics of the sample are measured. COPYRIGHT: (C)2007,JPO&INPIT
|
