| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for assisting the transfer of probe cards and capable of reducing operators's burden even if heavy weight probe cards are present and smoothly transferring the probe cards and provide inspection facilities. SOLUTION: The apparatus 55 for assisting the transfer of probe cards is provided with a holder 551 for holding a probe card 51; a retractable arm 552 having a tip part to which the holder 551 is mounted; a freely rotatable support 553 for supporting the arm 552; and an elevation-and-lowering driving device 554 for elevating and lowering the probe card 51 according to its weight via the support 553. The holder 551 comprises upper and lower first and second members 551A and 551B; four spring members 551C for connecting them; four wires 551D mounted to the first member 551A; and a capacitance sensor 551E for detecting the interval between the first and second members 551A and 551B. COPYRIGHT: (C)2007,JPO&INPIT
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