| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray CT equipment capable of magnifying a specimen to a certain degree to enable CT photographing, capable of rapidly changing the observation position and not requiring the re-chucking the specimen in the movement of the specimen because of this change. SOLUTION: Rotating mechanisms (4a and 4b) that rotates centering about the rotation axis R, crossing the X-ray optical axis L are provided between an X-ray emitting device 2 and an X-ray detector 3 and an articulated robot 4 for grasping the specimen W to make the position changed, and the attitude thereof is arranged thereabove to position the specimen W at an arbitrary position, with respect to the rotation axis R in an arbitrary attitude. The articulated robot 4 is driven appropriately, while holding the specimen W, as it is, to obtain a tomographic image which represents a slice of the specimen W at an arbitrary position in an arbitrary direction. COPYRIGHT: (C)2007,JPO&INPIT
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