| 摘要 |
PROBLEM TO BE SOLVED: To provide a displacement measuring apparatus and a displacement measuring method, capable of combining an optical triangulation ranging system and a confocal system, and simultaneously solving the problem of speckle noise of the optical triangulation ranging system, the problem the constitution becoming complex for the confocal system, etc. SOLUTION: An irradiation-system optical apparatus A, having a lens 4 that has chromatic aberrations, irradiates light to a sample 5 at an angle. A light-receiving system optical apparatus B, having a photodetector 14 receives reflected light from the sample 5. By measuring the position of incidence of the reflected light receive by the light receptor 14, it is possible to measure the height displacements of the sample 5 (height of the sample) according to the position of incidence. Since that any wavelength light irradiated to the sample 5 is focused on the sample 5 can be decided by the fact that the quantity of receive light at the position of incidence takes on a prescribed value or a higher value, height displacements of the sample 5 (height of the sample) can be measured, by determining the focus in this case. COPYRIGHT: (C)2007,JPO&INPIT
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