PRESSURE SENSORS AND METHODS OF MAKING THE SAME

摘要

A pressure sensor includes a base substrate (12) silicon fusion bonded to a cap substrate (14) with a chamber (16) disposed between the base substrate and the cap substrate. Each of the base substrate and the cap substrate include silicon. The base substrate includes walls defining a cavity (18) and a diaphragm portion (22) positioned over the cavity, wherein the cavity is open to an environment to be sensed. The chamber is hermetically sealed from the environment.