| 摘要 |
PROBLEM TO BE SOLVED: To provide a reduced pressure drying apparatus and a reduced pressure drying method capable of suppressing formation of pin holes called foreign matter defects or micro-defects attributed to generated dust (foreign matter) from a connection part. SOLUTION: The reduced pressure drying apparatus comprises a plurality of gas discharge ports 16 in the upper face part of the upper part box body 12B of the reduced pressure drying apparatus and a plurality of gas suction ports 18 in a lower face part of a lower part box body 12A. The plural number of the gas discharge ports is from 3 to 20 and the plural number of the gas suction ports is from 10 to 100. The diameter of each gas discharge port is from 30 mm to 500 mm and the diameter of each gas suction port is from 5 mm to 200 mm. COPYRIGHT: (C)2007,JPO&INPIT
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