发明名称 COATING DEVICE AND COATING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a coating device and a coating method, in each of which the time to dry a fluid material applied in a coating area is restrained from being shorter than the time to dry the fluid material applied in another area on the terminal end side of the applied fluid material. SOLUTION: The coating device is provided with: a coating head for continuously discharging an organic EL solution toward a substrate 9; a head moving mechanism for moving the coating head relatively to the substrate 9 to the main scanning direction and the subscanning direction; a substrate moving mechanism; and a control part for controlling the coating head, the head moving mechanism and the substrate moving mechanism. The organic EL solution is applied to the coating area 91 of the substrate 9 and also to a non-coating area 92 outside the coating area 91 on the terminal end side of the substrate 9 to be moved relatively to the coating head in the subscanning direction while each of the coating head, the head moving mechanism and the substrate moving mechanism is controlled by the control part. As a result, the concentration of a solvent component of the organic EL solution becomes higher on the terminal end side of the organic EL solution applied in the coating area 91 of the substrate 9, so that the time to dry the organic EL solution applied in the coating area can be restrained from being shorter than the time to dry the organic EL solution applied in another area. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007144240(A) 申请公布日期 2007.06.14
申请号 JP20050338065 申请日期 2005.11.24
申请人 DAINIPPON SCREEN MFG CO LTD 发明人 SUZUKI SATOSHI
分类号 B05C5/00;B05C15/00;B05D1/26;H01L51/50;H05B33/10 主分类号 B05C5/00
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