| 摘要 |
An object of the present invention is to make it possible to uniformly supply of a gas onto a base material in a way simpler and lower in cost, and thus, to realize a high-quality surface treatment. For that purpose, in surface treatment of a base material ( 12 ) by supplying a surface-treating gas on the surface of the base material ( 12 ) while conveying it in a particular direction, the peripheral surface of a rotor having a cylindrical peripheral surface ( 24 ) is made to face, via a gap ( 23 ), the surface of the base material ( 12 ) or an opposing member ( 20 ) formed at a position separated from the base material and the rotor is rotated around the axis in the direction almost perpendicular to the base material ( 12 )-conveying direction, as the means for supplying the surface-treating gas. By the rotation, the surface-treating gas is dragged in by the peripheral surface of the rotor ( 24 ), guided into the gap ( 23 ), and then, fed from the gap ( 23 ) onto the surface of the base material ( 12 ).
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