摘要 |
In a surface inspection apparatus that receives, through receiving optical fibers, reflected light from light from a light source projected onto the surface of an article being inspected through a projection optical fiber and generates a two-dimensional image corresponding to the surface of that article being inspected based on the amount of that light received, a plurality of receiving optical fibers are disposed around the projection optical fiber and the diameter of those receiving optical fibers is greater than the diameter of the projection optical fiber.
|