发明名称 SURFACE INSPECTION APPARATUS
摘要 In a surface inspection apparatus that receives, through receiving optical fibers, reflected light from light from a light source projected onto the surface of an article being inspected through a projection optical fiber and generates a two-dimensional image corresponding to the surface of that article being inspected based on the amount of that light received, a plurality of receiving optical fibers are disposed around the projection optical fiber and the diameter of those receiving optical fibers is greater than the diameter of the projection optical fiber.
申请公布号 US2007132990(A1) 申请公布日期 2007.06.14
申请号 US20060561950 申请日期 2006.11.21
申请人 KTS OPTICS CORPORATION 发明人 FUKAMI YUKIKO;ISHIKURA TORU;MORI HIDEO
分类号 G01N21/88 主分类号 G01N21/88
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