发明名称 SEALING MECHANISM IN RESIN SEALING MOLD APPARATUS
摘要 PROBLEM TO BE SOLVED: To keep at least the inside of an intra-mold space a stable airtightness at all times without any reduction of the airtightness even under any condition of a resin sealing molding, and further, by giving to it a proper sealing mechanism for exhibiting enough the merit of the workability obtained in a mold replacing work performed by a conventional sealing mechanism. SOLUTION: The sealing mechanism of a resin sealing mold apparatus 100 is such a sealing mechanism that the interfaces between its upper-mold-side and lower-mold-side attaching plates 15, 16 and its upper-mold-side and lower-mold-side external-air intercepting members 11, 12 are subjected respectively without any clearances to fixed junctions, in its upper-mold-side and lower-mold-side fastening portions 24(24a), 27(27a). COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007150054(A) 申请公布日期 2007.06.14
申请号 JP20050343742 申请日期 2005.11.29
申请人 TOWA CORP 发明人 IJIRI KAZUHIRO
分类号 H01L21/56;B29C45/34 主分类号 H01L21/56
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