LIQUID DISCHARGE NOZZLE HEAD AND ITS MANUFACTURING PROCESS

摘要

PROBLEM TO BE SOLVED: To provide a liquid discharge nozzle head excellent in reproducibility with a simple process. SOLUTION: A polyimide film 32 is formed by applying a polyimide on a PET sheet 33 and a hole 34 of a desired shape is formed by applying dry-etching process to the polyimide film 32 (Fig.3(A)). In this case, the etching shape of the polyimide film 32 is not formed in vertical shape but formed so as to have a tapered shape relative to the etching direction. A hole 35 with a desired size and shape is formed in a silicon substrate 31 using a dry etching (Fig.3 (B)). Further the silicon substrate 31 and the polyimide film 32 formed on the PET sheet 33 prepared thus are attached to each other as shown by the arrow in the Fig.3(A) and Fig.3 (B). COPYRIGHT: (C)2007,JPO&INPIT