| 摘要 |
A multi-layer device includes a first layer with a micro-mechanical component formed thereon. The device also includes first and second sealing layers, with the first layer sandwiched between the first and second sealing layers and anodically bonded thereto such that a cavity is defined therein. An electrode is provided within the cavity for reducing UV emission. The electrode is formed on at least a part of a surface of the second sealing layer internal to the cavity and arranged to be in electrical contact with the first layer.
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