| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a radiation detector for realizing a low price to produce a changing point for developing and expanding a new market, and to provide the radiation detector having wide variety at a low price. <P>SOLUTION: The method of manufacturing the radiation detector has steps of manufacturing a TFT array substrate before formation of a protective film using the same manufacturing steps St11-St15 as TFT array manufacturing processes of a liquid crystal display device; and cutting the manufactured substrate into a predetermined size, and then, stacking sensor portions on the TFT array substrate using sensor manufacturing steps St21-St24 to manufacture the radiation detector. As described above, the inexpensive radiation detector is realized by combining the manufacturing steps St11-St15 of the liquid crystal display device for forming the inexpensive TFT array substrate and the sensor manufacturing steps St21-St24. By diverting the TFT array used for the liquid crystal display device without any change, further cost reduction can be realized. <P>COPYRIGHT: (C)2007,JPO&INPIT |
