| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a cold-cathode field electron emission element capable of efficient electron emission by low-voltage drive. <P>SOLUTION: A support 101, a cathode electrode 102, the insulating layer 103, a gate electrode 104 having a gate hole 106 and a resist 107 are laminated and coated, a carbon material arranging hole 121 having diameter smaller than a gate hole 106 is formed from the gate hole 106 to the cathode electrode 102, then catalyst metals 109, 110 are coated and formed, lift-off treatment of the resist 107 and expansion treatment of the carbon material arranging hole 121 are performed, then, a carbon material 111 such as a carbon nanotube is developed on the catalyst metal 110. Thus, the cold-cathode field electron emission element is manufactured. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
