Single crystal growing apparatus

摘要

The object of the present invention is to provide a compact and inexpensive single-crystal growth apparatus. The single-crystal growth apparatus of the present invention which comprises spheroid mirrors 11, 12 , heat sources 13, 14 located at the one foci F₁, F₂ of the spheroid mirrors 11, 12 , a quartz tube 16 enclosing a heating zone 15 of the common focus F₀ on the other side, and, in the quartz tube 16 , a feed rod 18 supported by an upper crystal drive shaft 17 and a seed crystal rod 20 supported by a lower crystal drive shaft 19 . The interfocal distance between the foci F₁, F₂ and the foci F₀ is made 41.4-67.0 mm and the minor axis/major axis ratio of the spheroid mirrors is set to 0.90-0.95. In order to prevent excessive heat rise of the spheroid mirrors 11, 12 and infrared lamps 13, 14 attendant on downsizing of the spheroid mirrors 11, 12 , the spheroid mirrors 11, 12 internally include annular water-cooling jackets 39, 40 and air-cooling units 45 a , 46 a are provided for introducing cooling air from gaps 43, 44 of the spheroid mirrors 11, 12 at a flow rate of 1.2-2.3 m³/min. Further, ease of use is realized by self-circulating cooling water and imputing heat dissipation capacity utilizing a radiator 49.