Model generating apparatus, model generating system, and fault detecting apparatus

摘要

A model generating apparatus includes: a first input device for inputting process state information; a second input device for inputting test result information; a characteristic quantity extracting device for extracting a process characteristic quantity from the process state information in each of the areas; and an analyzing device for generating a process-quality model by executing an analysis of data mining using the process characteristic quantity and the test result information associated with each other. The model generating apparatus further includes: a third input device for inputting process position information so that the process position information can be associated with the process state information; and a fourth input device for inputting test position information so that the test position information can be associated with test result information.