| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a variable-shape mirror which is so structured as to have a plurality of thin films formed on one another, offers a flat and smooth mirror surface and is easy to fabricate. <P>SOLUTION: The variable-shape mirror 6 has a substrate 7, a lower electrode film 8 formed on the substrate 7, a piezoelectric film 9 formed on the lower electrode film 8, an upper electrode film 10 formed on the piezoelectric film 9, and a mirror film 12 formed directly on the substrate 7 and arranged to be surrounded by a driver portion 11 constituted by the lower electrode film 8, the piezoelectric film 9, and the upper electrode film 10. The mirror film 12 is arranged on a movable portion 7b provided in the substrate 7, and at least part of the driver portion 11 is arranged on the movable portion 7b. <P>COPYRIGHT: (C)2007,JPO&INPIT |
