| 摘要 |
PROBLEM TO BE SOLVED: To provide a static pressure water bearing linear slideway capable of facilitating removal, mounting, and washing. SOLUTION: This static pressure water bearing linear slide system is composed of a guideway 2 provided with a pair of ceramic rails 21a, 21b on the upper face of a ceramic rail base 23 in parallel by separating them from each other and provided with an electromagnet 24 between these rails 21a and 21b toward the upper face of the rail base 23 and the slideway 3 provided with two pairs of ceramic pads 33a to 33d on the bottom face of a carriage base 31 having a ceramic honeycomb structure so as to position them above the rails 21a, 21b, provided with a motor coil 34 at a central position on the bottom face, and provided with a ceramic keeper 32 provided with a pair of ceramic pads 33e, 33f extending downward from the bottom face of the carriage base 31 between the rails 21a on one side provided on the motor coil 34 and the guideway 2 in a lower part of a side face in the longitudinal direction at positions opposing to inner side faces in the longitudinal direction of the rails 21a, 21b by separating them from each other. COPYRIGHT: (C)2007,JPO&INPIT
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