| 摘要 |
The invention relates to an imprint apparatus for carrying out a two-step process for transferring a pattern from a template ( 1 ) to a target surface of a substrate. The apparatus works by creating an intermediate disc, e.g. from a flexible polymer stamp ( 10 ), by imprint from the template in a first imprint unit ( 200 ). A feeder device 410 is then operated to feed the intermediate stamp to a second imprint unit ( 300 ), where it is used to make an imprint in a target surface of a substrate.
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