| 摘要 |
In imaging optics with main optics having several optical elements, and in which the main optics are corrected for an observation radiation, there is further provided a transmissive, diffractive element, which is arranged and provided in the observation beam path of the imaging optics such that, due to the diffractive effect of the diffractive element, at least one aberration of the main optics is corrected for an inspection radiation having a different wavelength than that of the observation radiation.
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