Verfahren zur Herstellung eines Dehnungsmesssensors

摘要

An apparatus for detecting an amount of strain comprises a strain generating part (5), an electrical insulating layer (10) and sensing element (15). The strain generating part (5) is a member to which strain is to be applied. The electrical insulating layer (10) is formed on the strain generating part (5). The sensing elements (15) are formed on the electrical insulating layer (10). Each of the sensing elements ( 15) is made of a silicon film. The silicon film comprises a main layer and an interface-layer (9), which comes into contact with the electrical insulating layer (10). Both of the main layer and the interface-layer (9) are polycrystalline.