| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate processing apparatus and a substrate supporting apparatus, etc, capable of reducing a burden such as an apparatus weight and cost, while maintaining a processing accuracy. <P>SOLUTION: The substrate processing apparatus 1 performs processing of a substrate 3 by maintaining a z-directional accuracy by a processing supporting apparatus 9 such as an air float, thus making it possible to maintain a processing accuracy. In addition, the substrate processing apparatus 1 has a carrying region and a processing region having different required accuracy, an x-directional movement supporting apparatus 5 is provided over the carrying region and the processing region, an alignment supporting apparatus 7 is provided in the carrying region, and the processing supporting apparatus 9 is provided in the processing region. By adsorption and air blow by an air pad provided on the upper surface of each apparatus, transfer of a substrate between the x-directional movement supporting apparatus 5 and the alignment supporting apparatus 7 is performed. The z-directional accuracy in a region other than the processing region can be lowered as compared to that in the processing region, thus making it not necessary to provide a large weight and large size member for maintaining high accuracy for an entire body of the substrate processing apparatus 1. <P>COPYRIGHT: (C)2007,JPO&INPIT |
