发明名称 |
Methods and apparatus for transporting substrate carriers |
摘要 |
<p>According to a first aspect, a first conveyor system is provided that is adapted to deliver substrate carriers within a semiconductor device manufacturing facility. The first conveyor system includes a ribbon that forms a closed loop along at least a portion of the semiconductor device manufacturing facility. The ribbon is adapted to (1) be flexible in a horizontal plane and rigid in a vertical plane; and (2) transport a plurality of substrate carriers within at least a portion of the semiconductor device manufacturing facility. Numerous other aspects are provided, as are systems, methods and computer program products in accordance with these and other aspects.
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申请公布号 |
EP1750299(A3) |
申请公布日期 |
2007.06.13 |
申请号 |
EP20060022299 |
申请日期 |
2004.01.27 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
RICE, MICHAEL R.;LOWRANCE, ROBERT B.;ELLIOTT, MARTIN R.;HUDGENS, JEFFREY C.;ENGLHARDT ERIC ANDREW |
分类号 |
H01L21/00;B65G49/07;H01L21/677 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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