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发明名称
SEMICONDUCTOR PROCESSING PLATFORM ARCHITECTURE HAVING PROCESSING MODULE ISOLATION CAPABILITIES
摘要
申请公布号
EP1118103(B1)
申请公布日期
2007.06.13
申请号
EP20000946818
申请日期
2000.06.15
申请人
LAM RESEARCH CORPORATION
发明人
MOORING, BENJAMIN, W.;BRIGHT, NICOLAS, J.
分类号
B65G49/00;H01L21/00;F16K3/18;F16K51/02;H01L21/02;H01L21/677
主分类号
B65G49/00
代理机构
代理人
主权项
地址
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