Piezoelectric ink-jet printhead and method for manufacturing the same

摘要

A piezoelectric ink-jet printhead and a method for manufacturing the same are provided. The piezoelectric ink-jet printhead is formed by stacking three monocrystalline silicon substrates (100, 200, 300) on one another and adhering them to one another. The three substrates include an upper substrate (100), in which an ink supply hole (110) and on a bottom surface of which a pressure chamber (120) are formed, an intermediate substrate (200), in which an ink reservoir (210) and a damper (230) are formed, and a lower substrate (300) in which a nozzle (310) is formed. A restrictor (220), which connects the ink reservoir to the pressure chamber, may be formed on the upper substrate or intermediate substrate. A piezoelectric actuator is monolithically formed on the upper substrate.