发明名称 FUSE OF SEMICONDUCTOR DEVICE AND METHOD FOR FORMING THE SAME
摘要 A fuse of a semiconductor device and a method for forming the same are provided to improve errors of a repair process due to non-uniformity of thickness of residual interlayer dielectrics on a fuse line after a repair etch process. A fuse of a semiconductor device includes a plurality of fuse lines(502,505), an insulating layer for covering the plurality of fuse lines, and a wiring(509) connected to both side ends of the fuse line on the insulating layer. The fuse lines are formed with three-dimensional stepped multilayer structure so that a gap between the fuse lines of the three-dimensional stepped multilayer structure is increased in comparison with a gap between the fuse lines formed on a single layer.
申请公布号 KR20070060340(A) 申请公布日期 2007.06.13
申请号 KR20050119643 申请日期 2005.12.08
申请人 HYNIX SEMICONDUCTOR INC. 发明人 MA, SOOK RAK
分类号 H01L21/82 主分类号 H01L21/82
代理机构 代理人
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