发明名称 DEVICE FOR SPRAYING LIQUID
摘要 A solution spraying apparatus is provided to spray smoothly a solution without residues of the solution at a spraying unit by increasing surface tension of the solution using the difference of surface energy between an opposite surface to a base member in the spraying unit and the solution. A solution spraying apparatus includes a stage for loading stably a base member and a spraying unit. The spraying unit(1) is spaced apart from the stage in order to spray a predetermined solution onto the base member. The spraying unit includes at least one spraying hole(11) at an opposite surface against the base member. The surface energy of the opposite surface of the spraying unit is lower than that of the predetermined solution.
申请公布号 KR20070060292(A) 申请公布日期 2007.06.13
申请号 KR20050119548 申请日期 2005.12.08
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 YUN, YONG KUK;JEON, BAEK KYUN;SUH, DUCK JONG;JUNG, JIN SOO
分类号 H01L21/027;G02F1/13 主分类号 H01L21/027
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