SYSTEM FOR TRANSFERRING SEMICONDUCTOR WAFER

摘要

A semiconductor wafer transfer system is provided to restrain the generation of an unnecessary loss by removing a driving unit for moving an H guide, to reduce a time loss by simplifying wafer transfer processes and to minimize the damage of a wafer due to the increase of a contact area between the H guide and the wafer. A semiconductor wafer transfer system includes a wafer carrier(10), a transfer robot, a pair of V guides and a pair of H guides. The transfer robot(20) is installed at one side of the wafer carrier in order to transfer a semiconductor wafer from a storing space of the wafer carrier to a working position. The pair of V guides(30) are spaced apart from each other at the working position. The V guide has at least one V slot for loading and supporting one edge portion of the wafer. The pair of H guides(40) has an H slot for loading and supporting the other edge portion of the wafer. The H guide is arranged adjacent to the V guide in front of the V guide.