| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a transfer device capable of easily detecting whether or not an article such as a wafer and a liquid crystal glass is properly held on a hand without impairing the compactness of the hand in the transfer device for transferring the article by the hand while holding the article. <P>SOLUTION: In this transfer device, a first sucking hole 34 for suckingly holding the article 10 and a first air hole 40 connected to the first sucking hole through a through groove 43 are formed in the hand 31. Also a second sucking hole 44 and a second air hole 45 connected to the second sucking hole 44 through a through groove 48 are formed in the hand 31. The first air hole 40 and the second air hole 45 are connected to sucking means 41 and 46. In addition, the device comprises an air detection means 47 for detecting the suction pressure of the sucking means 46 connected to the second air hole 45. <P>COPYRIGHT: (C)2003,JPO</p> |
