| 摘要 |
A sensor cable assembly is provided to restrain the damage of a sensor cable connected to a cap sensor and to reduce the down-time of process equipment by using a tube. A sensor cable assembly is connected to a cap sensor, wherein the cap sensor is used for sensing the existence of a wafer. The sensor cable assembly includes a cable and a tube. The cable(110) is used for being connected to the cap sensor. The tube(100) encloses the cable. The cable is composed of at least two wires. The tube is used for spacing the wires of the cable apart from each other and is formed of silicon.
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