| 发明名称 |
FIXED VANE OF TURBO MOLECULAR PUMP |
| 摘要 |
<p>A stator vane of a turbo molecular pump suitable for reducing damage of the stator vane is provided. The stator vane (B) of a turbo molecular pump formed annular is formed by abutting a pair of stator vane halves (30,30). In this state, a gap (S) is formed in an inner rim portion (32).</p> |
| 申请公布号 |
EP1795756(A1) |
申请公布日期 |
2007.06.13 |
| 申请号 |
EP20050780851 |
申请日期 |
2005.08.26 |
| 申请人 |
BOC EDWARDS JAPAN LIMITED |
发明人 |
AKIMOTO, TAKESHI;KAWANISHI, SHINJI |
| 分类号 |
F04D19/04 |
主分类号 |
F04D19/04 |
| 代理机构 |
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代理人 |
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| 主权项 |
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