| 摘要 |
A workpiece to be processed is placed and fixed to an X-Y stage capable of translation motion along X-and Y-axis directions orthogonal to each other. The X-Y stage is moved to a first position. The X-Y stage is approach-run in the X-axis direction and in a negative Y-axis direction and stopped at a second position. The workpiece is processed while the X-Y stage stops at the second position. The process of moving the X-Y stage in the negative Y-axis direction by some distance and processing the workpiece while the X-Y stage stops, is repetitively executed. Even if the regularity of motion of the X-Y stage is disturbed, it is possible to suppress a lowered stage position accuracy. |
