| 摘要 |
A substrate supporting member and a semiconductor manufacturing apparatus having the same are provided to prevent contamination due to byproducts by providing a guide ring. A substrate supporting member includes a supporting part having an upper surface on which a substrate is loaded, and a guide ring installed on an edge of the supporting part to guide a position of the substrate loaded on the supporting part. The guide ring includes a ring body(138a) on which a part of the edge of the substrate is loaded, and a plurality of sliding prevention part(138b) disposed part from each other on an upper surface of the ring body to prevent the ejection of the substrate from a loading position.
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