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发明名称
摘要
申请公布号	JP3931454(B2)	申请公布日期	2007.06.13
申请号	JP19980318965	申请日期	1998.11.10
申请人		发明人
分类号	C23C18/16;H01L21/288	主分类号	C23C18/16
代理机构		代理人
主权项
地址

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