Integrated circuit containing polysilicon gate transistors and fully silicidized metal gate transistors

摘要

A method for manufacturing an integrated circuit 10 having transistors 20, 30 of two threshold voltages where protected transistor stacks 270 have a gate protection layer 220 that are formed with the use of a single additional mask step. Also, an integrated circuit 10 having at least one polysilicon gate transistor 20 and at least one FUSI metal gate transistor 30.