| 发明名称 |
Movable carriage for a lithographic apparatus and device manufacturing method |
| 摘要 |
A movable carriage for moving an article support member in a lithographic apparatus is provided. The article support member is constructed and arranged to move and support an article to be placed in a beam path of the lithographic apparatus. The carriage includes a compartmented composite structure.
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| 申请公布号 |
US7230254(B2) |
申请公布日期 |
2007.06.12 |
| 申请号 |
US20050231791 |
申请日期 |
2005.09.22 |
| 申请人 |
ASML NETHERLANDS B.V. |
发明人 |
TERKEN MARTINUS ARNOLDUS HENRICUS;JACOBS HERNES;VAN DER SCHOOT HARMEN KLAAS;VOSTERS PETRUS MATTHIJS HENRICUS;ZAAL KOEN JACOBUS JOHANNES MARIA |
| 分类号 |
G21K5/10;H01L21/027;G03F7/20;H01J37/20 |
主分类号 |
G21K5/10 |
| 代理机构 |
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代理人 |
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