| 摘要 |
<p>A capillary for a bonding tool is provided to reduce the mass of the capillary, to reduce the energy necessary for vibration, and to decrease a mechanical load by decreasing gradually the cross-section of the capillary from a retention portion to a tip using an improved intermediate portion. A capillary(20) for a bonding tool includes a retention portion(24) for clamping the capillary itself, a cone type portion, and an intermediate portion. The cone type portion(28) is formed at a tip portion of the capillary in order to perform a bonding process. The intermediate portion(26) is interposed between the retention portion and the cone type portion. The interfacial angle of the intermediate portion is smaller than that of the cone type portion.</p> |
