发明名称 |
Stereoscopic three-dimensional metrology system and method |
摘要 |
A stereoscopic three-dimensional optical metrology system and method accurately measure the location of physical features on a test article in a manner that is fast and robust to surface contour discontinuities. Disclosed embodiments may image a test article from two or more perspectives through a substantially transparent fiducial plate bearing a fiducial marking; camera viewing angles and apparent relative distances between a feature on a test article and one or more fiducials may enable accurate calculation of feature position.
|
申请公布号 |
US7231081(B2) |
申请公布日期 |
2007.06.12 |
申请号 |
US20020323720 |
申请日期 |
2002.12.18 |
申请人 |
APPLIED PRECISION, LLC |
发明人 |
SNOW DONALD B.;KRAFT RAYMOND H.;STROM JOHN T. |
分类号 |
G01B11/00;G06K9/00;G01B11/03;G01B11/245;G01B11/25;G01C11/06;H01L21/66;H05K13/00 |
主分类号 |
G01B11/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|