发明名称 Stereoscopic three-dimensional metrology system and method
摘要 A stereoscopic three-dimensional optical metrology system and method accurately measure the location of physical features on a test article in a manner that is fast and robust to surface contour discontinuities. Disclosed embodiments may image a test article from two or more perspectives through a substantially transparent fiducial plate bearing a fiducial marking; camera viewing angles and apparent relative distances between a feature on a test article and one or more fiducials may enable accurate calculation of feature position.
申请公布号 US7231081(B2) 申请公布日期 2007.06.12
申请号 US20020323720 申请日期 2002.12.18
申请人 APPLIED PRECISION, LLC 发明人 SNOW DONALD B.;KRAFT RAYMOND H.;STROM JOHN T.
分类号 G01B11/00;G06K9/00;G01B11/03;G01B11/245;G01B11/25;G01C11/06;H01L21/66;H05K13/00 主分类号 G01B11/00
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