| 摘要 |
In an ink jet printhead, the ink feeding duct ( 2 ), passing through the thickness of the silicon substrate, and in hydraulic communication with the ejection cells ( 8 ) through an outlet area ( 2 a) on the front surface ( 5 ) of the substrate ( 3 ), is built in three successive stages of erosion of the substrate ( 3 ), the first of which is performed on the rear surface ( 6 ) of the substrate, to produce a first cavity ( 24 ) having a depth (P 1 ), and a further cavity ( 26 ) communicating and having a depth (P 2 ), extending in the direction of the front surface ( 5 ), and presenting a back wall ( 28 ) separated from the front surface ( 5 ) by a diaphragm ( 30 ); the second stage is performed on the opposite front surface ( 5 ) to cut a channel ( 40 ) in the direction of the diaphragm ( 30 ), of depth (P 4 ) and defining the contour of the outlet area ( 2 a) on the front surface ( 5 ), and the third stage is performed from said rear surface ( 6 ) as a continuation of the erosion performed in the first stage, to remove the diaphragm ( 30 ) and open the duct ( 2 ) between the rear ( 6 ) and front ( 5 ) surfaces.
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