SUBSTRATE TRANSFER MEANS COMPRISING SUBSTRATE DETECTING SENSE

摘要

A substrate transferring unit having a substrate detecting sensor is provided to accurately detect whether a substrate is loaded on a robot arm when the substrate is transferred. A first robot arm(120) receives a substrate, and a first substrate detecting sensor(150) detects the substrate positioned on the first robot arm. A second robot arm(130) is vertically spaced apart from the first robot arm, and receives the substrate so that the substrate protrudes in a radial direction to the first robot arm. A second substrate detecting sensor(160) detects a protruding portion of the substrate received in the second robot arm. The first and second robot arms are supported by a frame and first and second substrate detecting sensors are installed on the frame.