| 摘要 |
A pendulum valve for semiconductor equipment is provided to achieve a reliable closing between a chamber and a vacuum pump by using a rotation member which is vertically moved by a second driving motor and installed on a pendulum plate for closing/opening the pendulum valve with a pendulum movement. A pendulum valve for semiconductor equipment includes a valve body(10), a pendulum plate(20), a driving motor(30), a sealing(40), and a closing unit(50). The valve body is installed in a connection tube. The pendulum plate is installed in the valve body and is vibrated as a pendulum to close/open the connection tube. The sealing is movably installed to an upper side of the pendulum plate. When the pendulum plate closes the connection tube, the closing unit causes the sealing to be in close contact with the pendulum plate to close the connection tube from the vacuum pump. The closing unit includes a rotating member(51), shaft members(52), an elastic member(53), and a second driving motor(54). The rotation member has at least four moving grooves perforated along a circumferential direction. Each moving groove has a slanting surface slanted along a rotational direction. One shaft member is inserted through each moving groove. One end of the shaft member is fixed to the sealing while the other end of the shaft member is provided with a head portion(52a) which is moved up and down along the slanting surface of the rotation member. The elastic member is positioned onto the head portion of the shaft member. The second driving motor rotates the rotation member.
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