发明名称 Low defect density, ideal oxygen precipitating silicon
摘要 The present invention is directed to a silicon wafer which, during the heat treatment cycles of essentially any arbitrary electronic device manufacturing process, may form an ideal, non-uniform depth distribution of oxygen precipitates and may additionally contain an axially symmetric region which is substantially free of agglomerated intrinsic point defects.
申请公布号 US7229693(B2) 申请公布日期 2007.06.12
申请号 US20050058996 申请日期 2005.02.16
申请人 发明人
分类号 B32B9/04;C30B29/06;C30B15/00;C30B15/20;C30B33/00;C30B33/02;H01L21/322 主分类号 B32B9/04
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