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经营范围
发明名称
Ru/Mo/Si Reflective Multilayer Mirror for Extreme Ultra Violet Lithography
摘要
申请公布号
KR100725859(B1)
申请公布日期
2007.06.08
申请号
KR20010028385
申请日期
2001.05.23
申请人
发明人
分类号
G02B1/10
主分类号
G02B1/10
代理机构
代理人
主权项
地址
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