发明名称 ILLUMINATION SYSTEM
摘要 <p>An illumination system is provided to substantially homogenize and remove at least some coherence from a beam of light by using a homogenizer and a coherence remover. An optical apparatus includes a coherence remover having plural channels, and a homogenizer converting a beam of light into plural beams of light, so that each beam of light passes through the respective channels of the coherence remover. An optical element is located between the homogenizer and the coherence remover to couple the beams of light output from the homogenizer into the channel of the coherence remover. The coherence remover has plural transmissive optical elements with different path lengths.</p>
申请公布号 KR20070058361(A) 申请公布日期 2007.06.08
申请号 KR20060120808 申请日期 2006.12.01
申请人 ASML NETHERLANDS B.V.;ASML HOLDING N.V. 发明人 VISSER HUIBERT;KLINKHAMER JACOB FREDRIK FRISO;RYZHIKOV LEV;COSTON SCOTT;JOOBEUR ADEL;VINK HENRI JOHANNES PETRUS;SHMAREV YEVGENIY KONSTANTINOVICH
分类号 H01L21/027 主分类号 H01L21/027
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