EMBEDDED CAPACITOR AND METHOD OF FABRICATING THE SAME

摘要

An embedded capacitor and a manufacturing method thereof are provided to obtain a high-dielectric constant, a low dielectric loss, and a high breakdown voltage by using an acceptor-doped BST((Ba1-xSrx)TiO3) film for the embedded capacitor. A manufacturing method of an embedded capacitor includes the steps of: forming a first electrode(120) by coating a metal on a substrate(110); forming a dielectric film(130) on the first electrode(120); and forming a second electrode(140) on the BST film; and forming a second electrode(140) after forming BST film(130) on the first electrode(120). The dielectric film(130) is an acceptor-doped BST film.