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发明名称
SUBSTRATE ROTATING APPARATUS
摘要
申请公布号
KR100726016(B1)
申请公布日期
2007.06.08
申请号
KR20000041397
申请日期
2000.07.19
申请人
发明人
分类号
H01L21/205;H01L21/683;F16C32/04;F16C39/06;H01L21/687
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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