DEPOSITION METHOD FOR VAPORIZING ORGANIC AND THE DEPOSITION APPARATUS FOR THE SAME

摘要

An organic material evaporating deposition method which improves luminance and quality of an organic light emitting display device finally produced by compensating a deposition ratio deviation due to fluctuations of deposition ratio and vibration of a deposition source, and an organic material evaporating deposition apparatus for the same are provided. An organic material evaporating deposition apparatus(100) comprises: an organic material evaporating deposition source(10) in which an organic material is contained to be evaporated by heating; a chamber(90) having the organic material evaporating deposition source mounted on an inner part thereof; a substrate(S) spaced apart from a nozzle part of the organic material evaporating deposition source in a predetermined distance; movement means(50) for enabling the organic material evaporating deposition source to be reciprocated in the total length direction of the substrate; a zone dividing sensor(40) mounted on the movement means to divide the organic material evaporating deposition source into zones of L1 to Ln relative to the total length direction of the substrate; a deposition ratio sensor(20) mounted on the organic material evaporating deposition source to sense the amount of the organic material evaporated; an operation part(60) connected to the deposition ratio sensor and the zone dividing sensor to calculate deposition ratios corresponding to the respective zones; and a control part(80) for reflecting information on the deposition ratios calculated by the operation part.