| 摘要 |
[PROBLEMS] To provide a method for analyzing trace components contained in a mixed gas containing fluorine gas easily and simply with high precision and an analyzer therefor. [MEANS FOR SOLVING PROBLEMS] A method for trace analysis, characterized by reacting (i) a mixed gas which comprises fluorine gas and a diluent gas and contains trace components with (ii) a hydrogen-containing substance to convert the fluorine gas into hydrogen fluoride, removing the hydrogen fluoride through fixation, and then analyzing the trace components by gas chromatography; and an analyzer for trace components which comprises a reactor tube forreacting (i) a mixed gas which comprises fluorine gas and a diluent gas and contains trace components with (ii) a hydrogen-containing substance, a tube filled with an alkali metal fluoride, a gas sampler composed of a six-way changeover valve capable of changing the flow channel of a carrier gas and a sample measuring tube capable of preparing a certain amount of a sample that is connected to the valve, and a gas chromatograph and which is piped so that the mixed gas and the hydrogen-containing substance can flow in this order.
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