| 摘要 |
PROBLEM TO BE SOLVED: To provide a planar inductor which can be used with various micro switches including a liquid metal micro switch. SOLUTION: The planar inductor of the present invention comprises a device substrate (150, 160), an inductor channel (105) which: is at least partially demarcated by a part of the device substrate; has at least one substantially spiral shape; and includes a plurality of channel segments substantially parallel to one another, and a liquid conductor (110) disposed in the inductor channel. COPYRIGHT: (C)2007,JPO&INPIT |
